A Nanometric Displacement Measurement System Using Differential Optical Feedback Interferometry

摘要

We propose differential optical feedback interferometry, a technique able to measure nanometer-size amplitude displacements by comparing the optical power of two lasers subject to optical feedback. In this letter, the principles of the technique are explained in detail, and its limits are explored by simulation. Theoretical results are presented showing that the technique can measure nanometer scale displacements with resolution within the angstrom scale. An experimental setup for validation has been built, and a series of experimental tests were performed using a capacitive sensor as a reference. Results show good agreement between theory and experiment with a reasonable reduction in performance due to mechanical coupling and signal noise. The proposed technique, thus, provides measurements of a very high resolution using an extremely simple and robust experimental setup.