Deposition of diamond-like carbon films by excimer lasers using frozen acetylene

摘要

Diamond-like carbon (DLC) films were deposited by laser ablation with the target made of frozen acetylene, instead of conventional graphite. An ArF laser and a KrF laser were used to dissociate frozen acetylene and to deposit DLC films on quartz substrates below 300/spl deg/C. The C-H bond was more abundant in the films deposited by the KrF laser. It was possible to deposit particle-free films in contrast to laser ablation of graphite targets. Experimental results suggested the importance of energetic and charged species ejected from frozen acetylene.