All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining

摘要

Bulk silicon micromachining is used to fabricate bistable optical fiber switches. The switches are based on a silicon device consisting of an actuator for fiber movement and a V-groove fiber clamp for bistable operation. The complete mechanical structures including thermal actuators are etched into standard >100< silicon wafers using anisotropic wet etching in KOH. While switching is caused by asymmetric thermal expansion of a U-shaped silicon cantilever, the fiber clamp is driven by the bimaterial effect. The efficient process technology allows a low cost batch fabrication of these devices. The switches exhibit an insertion loss >1 dB and a crosstalk of >-60 dB using standard single-mode fibers. A switching power below 1 W is required during switching.