Tunable microcavity based on InP-air Bragg mirrors

摘要

A tunable Fabry-Perot filter based on InP-air Bragg mirrors hasnbeen studied. The filter experimental performances are a resonance linenwidth of 0.6 nm and a tuning range of 62 nm for 14 V. The full-width atnhalf-maximum is kept below 1 nm over a 40-nm tuning range. The relationnbetween the bending of the suspended layers during the actuation and thenoptical properties of the filter are analyzed