A quantum-well-intermixing process for wavelength-agile photonic integrated circuits

摘要

Wavelength-agile photonic integrated circuits are fabricated using a one-step ion implantation quantum-well intermixing process. In this paper, we discuss, the issues in processing optimized widely tunable multisection lasers using this technique and present the results achieved using this process. This quantum-well intermixing process is general in its application and can be used to monolithically integrate a wide variety of optoelectronic components with widely tunable lasers.