Beam Properties of Visible Proton-Implanted Photonic Crystal VCSELs

摘要

We investigate the optical properties of proton-implanted photonic crystal (PhC) vertical-cavity surface-emitting lasers (VCSELs) emitting in the visible spectrum. The fabricated lasers have a threshold current of 1.3 mA and single-mode output power greater than 1 mW at room temperature. The incorporation of a PhC into the top facet of a proton-implanted VCSEL results in a stable single-fundamental-mode operation with a side-mode suppression ratio larger than 30 dB and a constant beam divergence independent of injection current level or ambient temperature. Using an index-step optical fiber model, we compare the effects of different hole etching depths to variations in output beam divergence. By varying the design and etching depth of the hole pattern, the lasers can either be optimized for low beam divergence or low threshold currents. The controllable refractive index guidance effect from the PhC allows for precise engineering of the optical properties of these visible VCSELs for consumer and imaging applications.