III–V Nanowires on Si Substrate: Selective-Area Growth and Device Applications

摘要

III–V nanowires (NWs) on Si are promising building blocks for future nanoscale electrical and optical devices on Si platforms. We present position-controlled and orientation-controlled growth of InAs, GaAs, and InGaAs NWs on Si by selective-area growth, and discuss how to control growth directions of III–V NW on Si. Basic studies on III–V/Si interface showing heteroepitaxial growth with misfit dislocations and coherent growth without misfit dislocations are presented. Finally, we demonstrate the integrations of a III–V NW-based vertical surrounding-gate field-effect transistor and light-emitting diodes array on Si. These demonstrations could have broad applications in high-electron-mobility transistors, laser diodes, and photodiodes with a functionality not enabled by conventional NW devices.