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Device and Integration Technology for Silicon Photonic Transmitters

机译:硅光子发射器的器件和集成技术

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The device and integration technology for silicon photonic transmitters are reviewed in this paper. The hybrid silicon platform enables on-chip lasers to be fabricated with silicon photonic circuits and can be integrated in the CMOS back-end flow. Laser arrays from multiple die bonding and quantum well intermixing techniques are demonstrated to extend the spectral bandwidth from the laser array of the transmitter. Two modulator technologies, silicon modulators and hybrid silicon modulators, are also described.
机译:本文综述了硅光子发射器的器件和集成技术。混合硅平台使片上激光器可以用硅光子电路制造,并且可以集成在CMOS后端流程中。来自多个管芯键合和量子阱混合技术的激光阵列被证明可以扩展发射器激光阵列的光谱带宽。还描述了两种调制器技术,即硅调制器和混合硅调制器。

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