III-N/Si₃N₄ Integrated Photonics Platform for Blue Wavelengths

摘要

In this paper, we report a low-loss photonic integrated circuits (PICs) platform at blue wavelengths of the visible spectral regime. Silicon nitride (SiN) is a popular passive waveguide material due to its fabrication flexibility, CMOS compatibility and spectral transparency in this wavelength regime. For active devices including lasers, gallium nitride (GaN) and its alloys are considered. Several basic building blocks for the development of a complete integrated platform, including blue diode lasers, in-plane- and out-of-plane light couplers, as well as on-and off-chip coupling between these active and passive components are theoretically investigated. The proposed in-plane and out-of-plane architectures operate through edge- and vertical grating couplers (VGCs), respectively. With edge-coupling, large mode-mismatch between the GaN laser diode and SiN waveguide is alleviated through nanotapers on both the active and passive sections and the calculated peak coupling efficiency is achieved to be 74% at a wavelength of 450 nm. We also separately designed efficient VGCs for coupling light from standard, commercial, off-the-shelf fibers to the SiN chip, and edge couplers for fiber-chip coupling, exhibiting coupling efficiencies of 51% and 83%, respectively. For robust on-chip light-coupling between active and passive circuit elements, with relaxed alignment tolerances, two approaches, i.e., flip-chip based hybrid integration and evanescent coupling based heterogeneous integration are studied. Calculated maximum coupling efficiencies of 40% (-4 dB) are achieved for both the hybrid and heterogeneous schemes. The theoretical work performed is an initial step towards demonstrating complex blue PICs which could offer a comprehensive range of photonic functionalities.