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Visible Wavelength Photonic Integrated Circuit in Silicon Nitride Platform for On-Chip Sensing Applications

机译：氮化硅平台中可见光波长光子集成电路，用于片上传感应用

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摘要

We present design and demonstration of visible light compatible silicon nitride waveguide and grating coupler for on-chip sensing applications.

机译：我们介绍了适用于片上传感应用的可见光兼容氮化硅波导和光栅耦合器的设计和演示。

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《Workshop on Recent Advances in Photonics》|2019年|1-3|共3页
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Sushma Gali; Varun Raghunathan; Shankar Kumar Selvaraja;
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Optical waveguides; Couplers; Gratings; Photonics; Silicon nitride; Couplings;

机译：光波导;耦合器;光栅;光子学;氮化硅;耦合;

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专利

1. Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices [J] . Wesley D. Sacher, Jared C. Mikkelsen, Ying Huang, Proceedings of the IEEE . 2018,第12期

机译：用于3-D光子电路和器件的单片集成多层氮化硅硅波导平台
2. Advanced Micro Foundry announces multi-layer Silicon Nitride-on-Silicon integration platform for photonic integrated circuits [J] . Hui Pan Fiber Optics & Communications: Monthly newsletter lovering domestic & international news on fiber optic communications and related fields . 2018,第11期

机译：高级微铸造厂宣布光子集成电路的多层氮化硅 - 硅集成平台
3. Wavelength Division Multiplexing Based Photonic Integrated Circuits on Silicon-on-Insulator Platform [J] . Selected Topics in Quantum Electronics, IEEE Journal of . 2010,第1期

机译：绝缘体上硅平台上基于波分复用的光子集成电路
4. Visible Wavelength Photonic Integrated Circuit in Silicon Nitride Platform for On-Chip Sensing Applications [C] . Sushma Gali, Varun Raghunathan, Shankar Kumar Selvaraja Workshop on Recent Advances in Photonics . 2019

机译：用于片上传感应用的氮化硅平台中可见波长光子集成电路
5. Integrated filters for the on-chip silicon photonics platform. [D] . Frank, Ian Ward. 2013

机译：片上硅光子平台的集成滤波器。
6. III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 μm Wavelength Range [O] . Ruijun Wang, Anton Vasiliev, Muhammad Muneeb, 2017

机译：III–V硅上光子集成电路用于2-4μm波长范围内的光谱传感
7. Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices [O] . Wesley D. Sacher, Jared C. Mikkelsen, Ying Huang, 2018

机译：用于3-D光子电路和装置的单片集成多层氮化硅对硅波导平台
8. Integration of Semiconductor Optical Amplifiers in Wavelength Division Multiplexing Photonic Integrated Circuits. Application of Selective Area Chemical Beam Epitaxy. [R] . Harmsma, P. J. 2000

机译：半导体光放大器在波分复用光子集成电路中的集成。选区化学束外延的应用。

Visible Wavelength Photonic Integrated Circuit in Silicon Nitride Platform for On-Chip Sensing Applications

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