Oxide breakdown in a metal-SiO/sub 2/-Si capacitor: influence of the metal electrode

Sarrabayrouse G.; Prom J.L.

首页> 外文期刊>IEE Proceedings. Part G, Circuits, Devices and Systems >Oxide breakdown in a metal-SiO/sub 2/-Si capacitor: influence of the metal electrode

【24h】

Oxide breakdown in a metal-SiO/sub 2/-Si capacitor: influence of the metal electrode

机译：金属SiO / sub 2 / -Si电容器中的氧化物击穿：金属电极的影响

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

The influence of the metal electrode, size, type and thickness on the breakdown field strength of a metal-SiO/sub 2/-Si capacitor with an insulating layer less than 100 AA thick is investigated. The results are interpreted in terms of stress at the SiO/sub 2/-Si interface.

机译：研究了金属电极，尺寸，类型和厚度对绝缘层厚度小于100 AA的金属SiO / sub 2 / -Si电容器的击穿场强的影响。根据SiO / sub 2 / -Si界面处的应力来解释结果。

著录项

来源
《IEE Proceedings. Part G, Circuits, Devices and Systems》 |1990年第6期|P.475-478|共4页
作者
Sarrabayrouse G.; Prom J.L.;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词

相似文献

外文文献
中文文献
专利

1. Improvement of the electrical properties of metal-SiO/sub 2/-silicon capacitors by a preoxidation HF/ethanol clean of the substrate [J] . Prom J.L., Morfouli P. IEE Proceedings. Part G, Circuits, Devices and Systems . 1991,第3期

机译：通过对基材进行预氧化HF /乙醇清洁来改善金属SiO / sub 2 /-硅电容器的电性能
2. Transients during pre-breakdown and hard breakdown of thin gate oxides in metal-SiO_2-Hi capacitors [J] . S. Lombardo, F. Crupi, C. Spinella, Materials science in semiconductor processing . 1999,第4期

机译：金属-SiO_2-Hi电容器中薄栅极氧化物的预击穿和硬击穿过程中的瞬态
3. Multiple breakdown model of carpet-bombing-like concaves formed during dielectric breakdown of silicon carbide metal-oxide-semiconductor capacitors [J] . Soshi Sato, Yuki Hiroi, Kikuo Yamabe, Japanese journal of applied physics . 2014,第8S1期

机译：碳化硅金属氧化物半导体电容器介电击穿过程中地毯状炸弹状凹坑的多重击穿模型
4. Electrode effects on the breakdown characteristics of high-k HfO2 metal-insulator-metal capacitors [C] . 2010 IEEE International Conference of Electron Devices and Solid-State Circuits . 2010

机译：电极对高k HfO 2 金属-绝缘体-金属电容器的击穿特性的影响
5. Vanadium Oxide Electrochemical Capacitors: An Investigation into Aqueous Capacitive Degradation, Alternate Electrolyte-Solvent Systems, Whole Cell Performance and Graphene Oxide Composite Electrodes. [D] . Engstrom, Allison Michelle. 2013

机译：氧化钒电化学电容器：对水电容降解，交替的电解质溶剂系统，全电池性能和氧化石墨烯复合电极的研究。
6. An Overview of High-k Oxides on Hydrogenated-Diamond for Metal-Oxide-Semiconductor Capacitors and Field-Effect Transistors [O] . Jiangwei Liu, Yasuo Koide 2018

机译：用于金属氧化物半导体电容器和场效应晶体管的氢化金刚石上高k氧化物概述
7. Effect of Film Thickness and Electrode Area on the Dielectric Breakdown Characteristics of Metallized Capacitor Films [O] . Ilkka Rytöluoto, Kari Lahti 2018

机译：薄膜厚度和电极面积对金属化电容膜介电击穿特性的影响

Oxide breakdown in a metal-SiO/sub 2/-Si capacitor: influence of the metal electrode

摘要

著录项

相似文献

相关主题

期刊订阅