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Closed-loop silicon accelerometers

机译:闭环硅加速度计

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摘要

The control-system structure and behaviour are considered for annanalogue and a digital servo-accelerometer having a dynamic range fromnmg to several g (1g=9.81 ms-2), for use in low-frequencynapplications. The paper emphasises the derivation of mathematicalnmodels, which are presented together with simulated and test resultsnobtained from the implementation of these strategies on anbulk-micromachined silicon sensing element employing capacitive signalnpick-off. The digital device, which is based upon oversamplingnconversion, proved to have superior stability compared to the analoguenaccelerometer. Furthermore, it has the advantages of producing a directndigital output signal and an inherent self-test feature
机译:考虑了模拟系统和动态范围从nmg到几g(1g = 9.81 ms-2)的数字伺服加速度计的控制系统结构和性能,适用于低频应用。本文强调了数学模型的推导,这些模型与通过在电容电容式信号拾取的大体积微机械化硅传感元件上实施这些策略而获得的仿真和测试结果一起呈现。与模拟加速度计相比,基于过采样n转换的数字设备具有更高的稳定性。此外,它具有产生直接数字输出信号和固有的自检功能的优点

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