Performance of a hybrid vacuum pump at low temperature

摘要

In this paper a novel concept of a mechanical pump able to run at low temperatures (80-25 K) is presented. Since gas density varies inversely with temperature, a pump delinvers much higher mass flow rate at low temperature than at room temperatures for a given size. Advantages of this concept are reduction in size and weight, when compared with a conventional pump scaled for the same mass flow rate at room temperature.