RGAs - more than just leak detectors

摘要

Residual Gas Analysers are very useful for troubleshooting semiconductor vacuum processes such as sputter deposition, plasma etching, chemical vapour deposition and ion implantation. RGAs measure residual gases in a vacuum chamber and operate at pressures below 10~(-5) mbar. Although commonly used simply as a leak detector, RGAs can also provide much more information about the state of a vacuum system or process, identify contaminants, and speed maintenance.