Static & Dynamic MEMS Device characterisation

摘要

MEMS are quickly pervading every aspect of the technical world but only a handful are making the grade as commercially viable products. The very diversity creates manufacturing differences that makes it difficult to create a wide variety of devices. In this article, Eleonora Ferraris and Irene Fassi from Institute of Industrial Technology and Automation, Biagio De Masi from MEMS Business Unit, STMicroelectronics, Richard Rosing and Andrew Richardson from Centre for Microsystems Engineering, Lancaster University discuss two empirical methods suitable for the static and the dynamic characterisation of micrometersized structures.