Design and implementation of MEMS Cockcroft-Walton voltage multiplier

摘要

A design modification to the Cockcroft-Walton (CW) voltage multiplier is reported for the purpose of miniaturisation using MEMS. The configuration comprises a cascade of CW voltage-doublers connected through their outputs and supply points (Vdd). Each voltage doubler is a two-stage CW multiplier that consists of four switches and three capacitors. The classical CW voltage multiplier has voltage amplification of Ns, where Ns = 2Nd (Nd is the number of voltage doublers), while the modified design has an amplification of 2Nd. Using this configuration, a novel MEMS voltage doubler has been experimentally realised with micro-relays and capacitors. The MEMS relays and capacitors were fabricated using the MetalMUMPs MEMS process. Measurements on the MEMS voltage doubler have been conducted. A voltage output of 400 V has been demonstrated, and the risetime is measured to be around 260 ms.