A Novel Sol–Gel src='/images/tex/25988.gif' alt='gamma '> -Al₂O₃ Thin-Film-Based Rapid SAW Humidity Sensor

摘要

In this paper, we are proposing a novel rapid sol–gel thin-film porous metal–oxide-based surface acoustic wave (SAW) humidity sensor. For the SAW sensor, the center frequency of 433.92 MHz has been selected, and the device has been configured in a high-frequency oscillator circuit to explore the frequency response in the presence of water vapor. The sensitive thin film of sol–gel -AlO coated with a drop dry method offers very high surface-to-volume ratio with the distribution of micropores making the sensor highly sensitive for moisture detection. Pore morphologies of the film have been studied by field emission scanning electron microscope and atomic force microscopy. The phase of alumina of the film has been characterized with X-ray diffraction. The sensor has been tested from 3% relative humidity (RH) to 85% RH. The proposed sensor has very fast ( s) response time and excellent yield ratio in comparison with the conventional commercial capacitive aluminum oxide sensor. The sensitivity (3%–20% RH) and the hysteresis (3%–85% RH) are found to be 120-Hz/% RH and 0.3%, respectively. The sensor can be useful for different applications, including moisture dispersion inside electronic gadgets, dryers, ovens, textile production, semiconductor device processing, food processing, medicine, and sealed packages.