Development of adamantane-containing polybenzoxazines for dielectric interlayers applications

摘要

Low dielectric constant materials are appropriate solutions to address the propagation delay problem in ultra-large scale integrated circuits. Herein, adamantane is applied to improve the dielectric properties of polybenzoxazines. Monomers synthesized from bisphenol-A, 4,4'-diphenol and 1-amino adamantane are developed for understanding the properties of polybenzoxazines at molecular level. We found that incorporating adamantane results in much lower dielectric constant and loss factor without sacrificing the glass transition temperature and thermal stability, which are potential alternates as new dielectric interlayer materials.