Modeling and simulation of temperature nano-probes for nano-devices with variable powers

摘要

The shape of the temperature nano-probes is a significant factor to evaluate the temperature measurement accuracy in the nanoscale temperature detection. Based on the finite element numerical simulation method, the temperature nano-probe model is established for nano-devices with variable powers. The temperature nano-probes with different shapes of sphere, rod, tube and disk are designed and studied. It is found that the heat transfer process between the nano-device and the temperature nano-probes is affected by the shape of nano-probes. Additionally it is dependent on the size of the device and the gap distance between the nano-device and nano-probes. The high stability and accuracy in the temperature measurement process is obtained in case of the nano-probe with the shape of nano-disk. The temperature error can be minimized through controlling the side length of the disk.