The Design of Phase-Locked-Loop Circuit for Precision Capacitance Micrometer

摘要

High precision non-contact micrometer is normally divided into three categories: inductance micrometer, capacitance micrometer and optical interferometer micrometer. The capacitance micrometer is widely used because it has high performance to price ratio. With the improvement of automation level, precision of capacitance micrometer is required higher and higher. Generally, capacitance micrometer consists of the capacitance sensor, capacitance/voltage conversion circuit, and modulation and demodulation circuits. However, due to the existing of resistors, capacitors and other components in the circuit, the phase shift of the carrier signal and the modulated signal might occur. In this case, the specific value of phase shift cannot be determined. Therefore, error caused by the phase shift cannot be eliminated. This will reduce the accuracy of micrometer. In this design, in order to eliminate the impact of the phase shift, the phase-locked-loop (PLL) circuit is employed. Through the experiment, the function of tracking the input signal phase and frequency is achieved by the phase-locked-loop circuit. This signal processing method can also be applied to tuber electrical resistance tomography system and other precision measurement circuit.