Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer

摘要

Two-dimensional periodic patterns with various periods and shapes were investigated via a novel two-axis Lloyd’s mirror interferometer, which allows the two mirrors to rotate independently. We created a theoretical model to reveal the relationships of all parameters in the system configuration and corresponding periodic arrays including the shapes of each nanostructure pattern by the polarization modulation. The wafer-level non-uniformity of the periodic arrays depends on the size of the expanded laser beams. Finally, we developed software with a friendly user interface to provide easy access to the theoretical model that configures the system and designs nanostructure arrays.