An Improved Dispatching Method (a-HPDB) for Automated Material Handling System with Active Rolling Belt for 450 mm Wafer Fabrication

摘要

The semiconductor industry is facing the transition from 300 mm to 450 mm wafer fabrication. Due to the increased size and weight, 450 mm wafers will pose unprecedented challenges on semiconductor wafer fabrication. To better handle and transport 450 mm wafers, an advanced Automated Material Handling System (AMHS) is definitely required. Though conveyor-based AMHS is expected to be suitable for 450 mm wafer fabrication, still it faces two main problems, traffic-jam problem and lot-prioritization. To address the two problems, in this research we have proposed an improved dispatching method, termed Heuristic Preemptive Dispatching Method using Activated Roller Belt (a-HPDB). We have developed some effective rules for the a-HPDB based on Activated Roller Belt (ARB). In addition, we have conducted experiments to investigate its effectiveness. Compared with the HPDB and R-HPD, two dispatching rules proposed in previous studies, our experimental results showed the a-HPDB had a better performance in terms of average lot delivery time (ALDT). For hot lots and normal lots, the a-HPDB had advantages of 4.14% and 8.92% over the HPDB and advantages of 4.89% and 8.52% over R-HPD, respectively.