A compact measurement system for harmonic vibration based on photoelectric array is proposed. Cooperating with a planar reflective mirror, which is fixed on the measured vibrating table, the photoelectric array outputs a vibration-sensitive signal. Theoretical model and simulation are discussed for the optical sensor. A frequency-tracking algorithm is proposed to realize effective measurement of vibration amplitude and frequency. Experiments are carried out on a precision vibrating table at different vibrating frequencies and different drive voltages, and reasonable results are achieved. Finally, taking the vibration with maximum amplitude as an example, the measurement results by laser Doppler interferometer are a frequency of 10 Hz and an amplitude of 72.25 μm, the measurement results by the optical sensor are a frequency of 10 Hz and an amplitude of 72.05 μm. Theoretical and experimental results show the feasibility of this system in harmonic vibration parameter measurements.
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