Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors

摘要

We report the preparation of (Ba, Sr)RuOsub3/sub ceramic targets in a conventional process in air at ambient pressure and their epitaxial thin-film growth on Basub0.7/subSrsub0.3/subTiOsub3/sub buffered SrTiOsub3/sub substrates. We found that a simultaneous addition of CuO and SiOsub2/sub is effective in obtaining the relatively dense ceramics. The microstructural and chemical investigations show that the synergetic effect of a liquid-phase (Ba-Sr-O) assisted grain growth accelerated by Cu-derived Ru charge inhomogeneity along with a rearrangement of grains promoted by a liquid-phase silicate is the mechanism of the (Ba, Sr)RuOsub3/sub densification. We demonstrate that all epitaxial BaTiOsub3/sub thin-film capacitors with (Basub1? x /subSrsub x /sub)RuOsub3/sub electrodes can be obtained up to x of 0.6.