Vibrational micro-energy harvesters utilizing Nb-doped Pb(Zr,Ti)O3 films on stainless steel substrates

L Van Minh; T Sano; T Fujii; H Kuwano

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Vibrational micro-energy harvesters utilizing Nb-doped Pb(Zr,Ti)O3 films on stainless steel substrates

机译：振动微能收割机利用不锈钢基板上的Nb掺杂Pb（Zr，Ti）O3薄膜

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ThisworkpresentsthemicromachinedenergyharvestersusingNb-dopedPb(Zr,Ti)O3(PNZT)filmsgrowndirectlyonthestainlesssteelsubstrates(SUS430).Piezoelectricmaterialsonmetallicsubstrateshavebeenattractedtopracticalandrobustenergyharvesters.Nb-dopedPZTfilmswith(001)-preferredorientationgrownonSUSsubstratesprovidedexcellentpropertiesforenergyharvesting-highpiezoelectriccoefficient(e31=-10.6C/m2)andlowdielectricpermittivity(?r=373).ThePNZT-basedmicro-energyharvestercomprisingacantileverof1.7mm×5mm×0.05mmandaproofmassof3mm×5mm×47mmachievedthenormalizedpowerdensity(NPD)of2.87mW.g-2.cm-3.ItisthehighestperformanceamongthepublishedSUS-basedenergyharvesters,beingclosertothebestSi-basedenergyharvesters...

机译：ThisworkpresentsthemicromachinedenergyharvestersusingNb-dopedPb（锆，钛）O3（PNZT）filmsgrowndirectlyonthestainlesssteelsubstrates（SUS430）.Piezoelectricmaterialsonmetallicsubstrateshavebeenattractedtopracticalandrobustenergyharvesters.Nb-dopedPZTfilmswith（001）-preferredorientationgrownonSUSsubstratesprovidedexcellentpropertiesforenergyharvesting-highpiezoelectriccoefficient（E31 = -10.6C /平方米）andlowdielectricpermittivity（R = 373）.ThePNZT-basedmicro- EnergyharvesterComprisingacentileverof1.7mm×5mm×0.05mmandaproofmassof3mm×5mm×47mmachiveThenormalizedPowerdentions（NPD）2.87mw.g-2.cm-3.itisthehighestperformancongthepultedsus-brieshengeryharvesters，BiSclosertothebestsi-BasialEnergy Qualliesergersegers ...

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《Journal of Physics: Conference Series》 |2016年第1期|共页
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L Van Minh; T Sano; T Fujii; H Kuwano;
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1. Characterization of Nb-doped Pb(Zr,Ti)O_3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications [J] . Fujii T., Hishinuma Y., Mita T., Sensors and Actuators, A. Physical . 2010,第1期

机译：射频磁控溅射在MEMS应用中表征沉积在不锈钢和硅衬底上的Nb掺杂Pb（Zr，Ti）O_3膜
2. Orientation-dependent piezoelectricity and domain characteristics of tetragonal Pb(Zr0.3,Ti0.7)0.98Nb0.02O3 thin films on Nb-doped SrTiO3 substrates [J] . Yu Qi, Li Jing-Feng, Sun Wei, Applied Physics Letters . 2014,第1期

机译：Nb掺杂SrTiO3基体上四方Pb（Zr0.3，Ti0.7）0.98Nb0.02O3薄膜的取向压电性和畴特征
3. Micropatterned epitaxial (Pb,La)(Zr,Ti)O-3 thin films on Nb-doped SrTiO3 substrates by a chemical solution deposition process with resist molds [J] . Aoki T, Kuwabara M, Kondo M, Applied Physics Letters . 2004,第13期

机译：Nb掺杂SrTiO3衬底上通过抗蚀剂模具化学溶液沉积工艺形成的微图案外延（Pb，La）（Zr，Ti）O-3薄膜
4. {001}-Textured Nb-Doped Pb(Zr,Ti)O3 Thin Films on Stainless Steel by Pulsed Laser Deposition [C] . Juliette Cardoletti, Philipp Komissinskiy, Silvo Drnovšek, IEEE International Symposium on Applications of Ferroelectrics . 2021

机译：通过脉冲激光沉积 - 通过脉冲激光沉积构成的Nb掺杂Pb（Zr，Ti）O3薄膜
5. Self-Polarization Induced Magnetoelectric Coupling in Lanthanum Strontiummanganite (LA0.67SR0.33MNO3)AND Lead Zirconate Titanate (PBZR0.52TI0.48O3) Thin Film Heterostructures [D] . Xiaoqian, Yu. 2018

机译：镧锶锰（LA0.67SR0.33MNO3）和锆钛酸铅（PBZR0.52TI0.48O3）薄膜异质结构中的自极化感应磁电耦合
6. Strain assisted electrocaloric effect in PbZr0.95Ti0.05O3 films on 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 substrate [O] . Zhenghu Zuo, Bin Chen, Baomin Wang, -1

机译：在0.7Pb（Mg1 / 3Nb2 / 3）O3-0.3PbTiO3衬底上的PbZr0.95Ti0.05O3薄膜中的应变辅助电热效应
7. Growth and electrical properties of compositionally graded Pb(Zr xTi1-x)O3 thin films on PbZrO3 buffered Pt/Ti/SiO2/Si substrates [O] . Tang XG, Wang J, Chan HLW, 2004

机译：在PbZrO3缓冲的Pt / Ti / SiO2 / Si衬底上组成渐变的Pb（Zr xTi1-x）O3薄膜的生长和电性能

Vibrational micro-energy harvesters utilizing Nb-doped Pb(Zr,Ti)O3 films on stainless steel substrates

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