Since the discovery of the Quantum Spin Hall Effect, electronic and photonic topological insulators have made substantial progress, but phononic topological insulators in solids have received relatively little attention due to challenges in realizing topological states without spin-like degrees of freedom and with transverse phonon polarizations.?Here we present a holey silicon-based topological insulator design, in which simple geometric control enables topologically protected in-plane elastic wave propagation up to GHz ranges with a submicron periodicity. By integrating a hexagonal lattice of six small holes with one central large hole and by creating a hexagonal lattice by themselves, our design induces zone folding to form a double Dirac cone. Based on the hole dimensions, breaking the discrete translational symmetry allows the six-petal holey silicon to achieve the topological phase transition, yielding two topologically distinct phononic crystals. Our numerical simulations confirm inverted band structures and demonstrate backscattering-immune elastic wave transmissions through defects including a cavity, a disorder, and sharp bends. Our design also offers robustness against geometric errors and potential fabrication issues, which shows up to 90% transmission of elastic waves even with 6% under-sized or 11% over-sized holes. These findings provide a detailed understanding of the relationship between geometry and topological properties and pave the way for developing future phononic circuits.
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