Analysis of residual errors during computer controlled polishing

Simon Killinger; Alexander Haberl; Rolf Rascher

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Analysis of residual errors during computer controlled polishing

机译：分析计算机控制抛光过程中的残留误差

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摘要

In computer controlled subapertur polishing the formation of mid spatial frequency errors (MSFE) needs special attention. In this work the formation of MSFE in feed direction is investigated using the ADAPT tool from Satisloh.

机译：在计算机控制的亚孔径抛光中，需要特别注意中空频率误差（MSFE）的形成。在这项工作中，使用Satisloh的ADAPT工具研究了进料方向MSFE的形成。

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《EPJ Web of Conferences》 |2019年第6期|共2页
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Simon Killinger; Alexander Haberl; Rolf Rascher;
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中图分类物理学;
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Analysis of residual errors during computer controlled polishing

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