This paper presents the design, analysis and simulation of MEMS based array of bimorph rectangular microcantilever piezoelectric energy harvester structure with and without tip mass, to analyze their sensitivity. The microcantilever beams are made up of piezoelectric material and Aluminium as a substrate material. The analytical simulation of design is done by FEM (COMSOL Multiphysics). The simulation results of bimorph cantilever structure, applied force of 0.1 N and obtained end displacement and electric potential developed are given. The analytical model of the cantilever beam will be analyzed and the process of its construction will be discussed. The changes in the sensitivity of a cantilever beam with respect to change in its shape for the same applied force of 0.1N are denoted.
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