单悬臂梁阵列式压电能量采集器的研究∗

摘要

根据当前物联网以及无线传感网络的需求,以MEMS技术为依托,结合压电效应,提出了一种单悬臂梁阵列式压电式能量采集器。在分析压电能量采集器结构力学特性的基础上,详细介绍了两种不同尺寸微结构的设计、加工和测试。采用 ANSYS 软件仿真,得出两种微结构的谐振频率分别为3．9和4 kHz；利用溶胶-凝胶法制备出15和20层的 PZT 压电功能薄膜,电镜扫描其厚度分别为1849,2667 nm,AFM对比表面形貌其粗糙度分别为1．8和2．11 nm,后者致密更好,颗粒较小,相变温度相对比较高。%In view of the demand of current internet and wireless sensor networks,an energy harvester was pro-posed based on piezoelectric effect and MEMS technology.Based on mechanical properties analysis of the piezoe-lectric energy harvester,design,simulation,fabrication and test of piezoelectric energy harvesters with two dif-ferent sizes were described.The PZT piezoelectric thin film was statically simulated with ANSYS,and the first-order resonance frequencies of the two microstructures were 3.9 and 4 kHz,respectively.The PZT piezoelectric thin film of the energy harvester was manufactured with sol-gel method.Electron microscope scanning the 1 5 and 20 layers film show the thickness was 1 849 and 2 667 nm,respectively,the comparision of the AFM sur-face topography the roughness 1.8 and 2.11 nm,the latter density better,smaller particles,phase transition temperature was relatively higher.