Active Compensation of Dynamic Errors in a Coordinate-Measuring Machine * * This work was supported by the DFG (Deutsche Forschungs-gemeinschaft / German Research Foundation) under grants SA 847/16-1, OS 111/42-1.

摘要

Abstract: Measuring systems for production quality control face increasing demands in both measurement velocity and accuracy The undesired dynamic effects of measuring machines pose more stringent limits to the measurement velocity than modern optical sensors for surface metrology for example chromatic confocal point sensors. These dynamics are investigated at an exemplary coordinate measuring machine and their negative effects on the measured values are described. A compensation system for the reduction of the induced errors based on internal deviation sensors is proposed and investigated. Subsequently a dynamic model for the machine’s dominant dynamic effects is identified in order to transfer the compensation system to machines without internal deviation sensors.