Nonlinear Model Predictive Control of the Czochralski Process * * Supported by Prediktor AS and the Research Council of Norway.

摘要

Abstract: Commercially, the Czochralski process is the most commonly applied method for production of monocrystalline silicon for semiconductor and solar cell applications. The process has traditionally been controlled using nested single-loop controllers. Due to the complex and nonlinear nature of the Cz process, this paper considers model-based control of the process with application of nonlinear model predictive controllers.