Some metal oxides and their applications for creation of Microsystems (MEMS) and Energy Harvesting Devices (EHD)

摘要

ThisisareviewofapartoftheworkoftheTechnologicalDesignGroupatTechnicalUniversityofSofia,FacultyofElectronicEngineeringandTechnologies,DepartmentofMicroelectronics.Itisdealingwithpiezoelectricpolymermaterialsandtheirapplicationindifferentmicrosystems(MEMS)andEnergyHarvestingDevices(EHD),someorganicmaterialsandtheirapplicationsinorganic(OLED)displays,sometransparentconductivematerialsetc.ThemetaloxidesLeadZirconiumTitanate(PZT)andZincOxide(ZnO)areusedaspiezoelectriclayers-drivingpartofdifferentsensors,actuatorsandEHD.Thesematerialsarestudiedintermoftheirperformanceindependenceonthedepositionconditionsandparameters.TheyweredepositedasthinfilmsbyusingRFSputteringSystem.Astechnologicalsubstrates,glassplatesandPolyethylenetherephtalate(PET)foilswereused.Forcharacterizationofthematerials,ateststructure,basedonSurfaceAcousticWaves(SAW),wasdesignedandprepared.ThelayerswerecharacterizedbyFourierTransformInfraredspectroscopy(FTIR).Thepiezoelectricresponsewastestedatvarietyofmechanicalloads(tensilestrain,stress)instaticanddynamic(multiplebending)mode.Thesingle-layeredanddouble-layeredstructureswerepreparedforpiezoelectricefficiencyincrease.Astructureofpiezoelectricenergytransformerisproposedandinvestigated...