Development of Highly Accurate and Robust Roundness Measuring Instrument

摘要

We developed a high accuracy roundness measuring instrument with high robustness. The high robustness is achieved by utilizing contactless mechanisms for two moving axes. Air bearing technique is used as guiding mechanism and linear shaft motor technique is used as driving mechanism. We discuss several key techniques to achieve the highly accurate and robust roundness measurements. In regard to achieved accuracy parameters, the key feature is the parallelism error to be within 0.5 μm/350mm.