Development of New Type Ion Source of Quadrupole Type Mass Spectrometer for UF6 Analysis

摘要

A new type ion source including sample inlet pipe of quadrupole type mass spectrom-eter for analysis of UF6 has been made. Fundamental characteristics of the ion source, such as pressure characteristic, flow rate, sensitivity of the ion source for UF6, inlet and evacuation characteristic were evaluated. The ion source showed good operational stability under low pressure and small flow rate, which were 1.02.0 Torr and 0.30.4 mg/h, re-spectively. Inlet characteristic was within 60 s, evacuation characteristic to remove residual UF6 less than 0.1% level was 15 s. Sensitivity coefficient of the ion source was 0.51.0 Torr-1. In consequence, it proved that the ion source had long life and memory effect was negligible small.This ion source was also applied to measure 236U isotope ratio. Both precision and ac-curacy were within ±0.40% for UF6 sample whose enrichment was more than 1.0%. It was clear that this ion source had good performances and it contributed to isotope ratio measurements with good accuracy.