Mechanical and Tribological Properties of Carbon Thin Film with Tungsten Interlayer Prepared by Ion Beam Assisted Deposition

摘要

Mechanical and tribological properties of the thin carbon film with tungsten interlayer were investigated. The carbon film (130 nm) and the tungsten interlayer (20 nm) were prepared by ion beam assisted deposition (IBAD) method. Both layers were electron beam evaporated and were simultaneously irradiated by the beam of argon (Ar) or nitrogen (N) ions with energy of 700 eV. Mechanical properties of the thin carbon film with tungsten interlayer were investigated by the nanoindentation method. Concerning tribological properties the coefficient of friction was investigated by means of pin on disc tribometer. Phase composition was investigated by X-ray diffraction method (XRD), and bonding characterization of carbon thin film was characterized by Raman spectroscopy.