钨含量对WC/DLC复合薄膜摩擦学性能的影响

摘要

利用等离子体辅助化学气相沉积技术复合非平衡磁控溅射技术制备具有不同钨含量的 WC ／DLC 复合薄膜。通过调节 WC 靶功率实现薄膜中钨含量的控制，用 EDS 能谱仪测量薄膜中的钨含量，采用 SEM分析薄膜的表面形貌和结构，采用 Raman 光谱分析不同钨含量对薄膜结构的影响，采用纳米硬度测试仪测试薄膜的纳米硬度，在球－盘摩擦试验机上测试薄膜在大气环境中的摩擦学性能，研究薄膜的力学性能、摩擦学性能与薄膜中钨含量之间的关系。结果表明：薄膜中的钨含量随着 WC 靶功率的增加而增加；制备的薄膜具有典型的类金刚石碳膜结构，并且薄膜中的 sp3键含量以及薄膜硬度都随着钨含量的增加而增大；摩擦因数和耐磨寿命随着钨含量的增加呈先减小后增加的趋势，薄膜的摩擦因数在钨原子质量分数为41．67％时最小，在此参数下的耐磨寿命也最优异。%WC /DLC composite films with different tungsten content were deposited by PECVD assisted unbalanced mag-netron sputtering technology.Controlling of tungsten content was realized by adjusting WC target power.Tungsten content of WC /DLC films was measured by EDS.Surface morphology and structure of the films were analyzed by using SEM.Influ-ence of different tungsten content on microstructure of the films was analyzed by using Raman spectroscopy.Nano-hardness of films was tested on CSM Nano-hardness tester.Tribological properties of the films were tested on ball-on-disk friction tester in atmosphere.The relationship between mechanical properties,tribological properties and tungsten content was also researched.The results show that,as increasing of WC target power,the tungsten content of the films is increased.WC /DLC films have typical diamond-like carbon film structure,and the hardness and sp3 bonding contents in films are also in-creased along with increasing of tungsten content.The friction coefficient and wear lifetime of the films show a trend of first increase and then decrease along with increasing of tungsten content.When tungsten content is in atom mass fraction of 41.67%,the films show the lowest friction coefficient,and the best wear lifetime.