HIGH RESOLUTION, REAL-TIME LINE-FIELD FOURIER-DOMAIN INTERFEROMETRY

摘要

To increase the application potential in manufacturing process, such as monitoring the processing performance, the profile measurement should be provided in real-time display and with high resolution simultaneously. We propose a line-field Fourier-domain interferometric method (LFI), which combines the line-field microscope with spectral interferometer, for the surface cross-sectional profile measurement with no scan needed. The white light and objectives are employed to offer high axial and lateral resolution, respectively. In our system setup, the measurement could be implemented in real-time display of 10 frame/s, and the resolutions of the LFI system in X,Y, and Z directions are ~8 μm, ~3.2 μm, and ~1.4 μm, respectively. As a demonstration, the cross-sectional profiles of a microfluidic chip are tested. The graphics processing unit is also used to accelerate the reconstruction algorithm to achieve the real-time display of the cross-sectional profiles.