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(Invited Paper) Applications of Ultrafast Lasers in Microfabrication

机译:(特邀论文)超快激光在微细加工中的应用

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摘要

Just as photolithography technology brought about the miniaturization of integrated circuits and drove multiple market opportunities in the electronics sector, a similar inflection point has arrived for ultrafast lasers. While these femtosecond class lasers have long enabled the precise manipula-tion of matter without heat affects, only recently, with the advent of commercial grade systems, has the potential of the technology been realized. Fiber optic architecture, embedded software control and robust telecom components have been leveraged to ensure the reliability, ease of use, and per-formance standards required in manufacturing settings. With femtosecond laser microfabrication tools now accessible to industry, the relevance of femtosecond lasers to modern manufacturing has become clear based on compelling economics, unparalleled precision, and new flexibility with re-spect to materials. These new capabilities are opening up enormous opportunities in automotive components, consumer electronics, medical devices, aerospace and bioscience applications.
机译:就像光刻技术带来了集成电路的小型化并带动了电子领域的多个市场机会一样,超快激光器也出现了类似的拐点。这些飞秒级激光器长期以来一直能够精确地操纵物质而不会产生热影响,但是直到最近,随着商业级系统的出现,才实现了该技术的潜力。光纤架构,嵌入式软件控制和强大的电信组件已被利用,以确保制造设置所需的可靠性,易用性和性能标准。飞秒激光微细加工工具现已投入工业使用,飞秒激光与现代制造的相关性基于引人注目的经济性,无与伦比的精度以及对材料的新灵活性而变得清晰起来。这些新功能为汽车零部件,消费电子,医疗设备,航空航天和生物科学应用领域带来了巨大的机遇。

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