Flexible and rapid preparation of FeSi2 microdots and indium tin oxide (ITO) microstructure patterns was performed using laser-induced forward transfer with a nanosecond high-frequency di-ode-pumped solid-state laser/galvanometer-based point-scanning system. Different types of source materials, i.e., FeSi2 and ITO, were used to explore the materials dependence of transfer. FeSi2 spheres with a lateral diameter of 5.5 μm were successfully arrayed on a micrometer scale. Sub-spot transfer was achieved, and we refer to this as laser-induced dot transfer (LIDT). In the case of ITO, although the transferred shape is flower-like rather than spherical, site-controlled transfer was achieved. The LIDT technique is useful for integrating functional micro-patterns with sub-spot reso-lution under room-temperature atmospheric conditions.
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