Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric

摘要

For measuring the surface profile of many micro-optical components with complicated shapes, which are madeof non-conductive material, the electrostatic force microscopy (EFM) was recommended. The relationship between thepolarization force and the tip-to-sample distance was analyzed based on dielectric polarization theory. The prototype ofthe scanning electrostatic force microscopy was built. The force curves of different samples with different materials andsurface shapes were detected by the EFM prototype. Both theoretical analysis and the experimental results demonstratedthat the EFM system can be used to measure the surface profile of non-conductor.