Planar Microstrip Ring Resonator Structure for Gas Sensing and Humidity Sensing Purposes

摘要

A planar microstrip ring resonator structure on alumina was developed. It was covered with a zeolite film. The device was successfully operated at around 8.5 GHz at room temperature as a humidity sensor. In the next step, an additional planar heater will be included on the reverse side of the resonator structure to allow for testing of gas sensitive materials under sensor conditions.