Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe

摘要

Electron cyclotron resonance (ECR) plasma was produced at 2.45 GHz using 200 a€“ 750 W microwave power. The plasma was produced from argon gas at a pressure of 2 ?— 10a?’4 mbar. Three water-cooled solenoid coils were used to satisfy the ECR resonant conditions inside the plasma chamber. The basic parameters of plasma, such as electron density, electron temperature, floating potential, and plasma potential, were evaluated using the currenta€“voltage curve using a Langmuir probe. The effect of microwave power coupling to the plasma was studied by varying the microwave power. It was observed that the optimum coupling to the plasma was obtained for a?? 600 W microwave power with an average electron density of a?? 6 ?— 1011 cma?’3 and average electron temperature of a?? 9 eV.