Silver Containing Carbon Amorphous Nanocomposite Films Deposited by Termionic Vacuum Arc Technique

摘要

We investigated the synthesis of silver containing carbon amorphous composite films deposited by thermionic vacuum arc technique, using two electron beams emitted by externally heated cathodes: applying high voltages (1–5kV) between cathodes and the two anodes (carbon and silver), two bright plasma were ignited in carbon and silver atoms. Morphology, chemical composition, microstructure and crystallographic properties of the films were studied by scanning electron microscopy, x-ray photoelectron spectroscopy and low-angle x-ray diffraction. Some mechanical properties (the friction coefficients) were also investigated using a CSM ball-on-disk tribometer.