Measurement of the vibration state of an array of micro cantilevers by diffractional methods

摘要

The amplitude of vibration of an array of micro‐cantilevers piezoelectrically excited has beenmeasured by analyzing the diffraction pattern given by the structure. A model for the simulation ofthis situation, and some out‐of‐plane interferometric measurements based on diffraction pattern,have been developed and performed to fully understand the dynamic of the elements and thediffraction pattern produced by them.