Effect of Mg Doping on Structural and Optical Properties of Al-Mg Co-doped ZnO Thin Films Deposited via Sol-gel Technique

摘要

Aluminium doped and (Mg-Al) co-doped zinc oxide thin films were deposited by sol-gel technic from aqueous solution onto glass substrates at optimum conditions. The variations of the structural, electrical and optical properties with the doping and co-doping concentration were investigated. XRD analysis showed typical patterns of the hexagonal ZnO structure for all films and AMZO thin films exhibited preferred orientation growth along the c-axis. No diffraction peaks of any other structure were found. The grain size, texture coefficient and optical band gap values were evaluated for different aluminum concentrations and (Mg-Al) co-doping ratio. The results show that increasing the Mg content, the films improve their crystallinity with the (002) preferred orientation and the transmittance reaches 85%. The optimized results were obtained for co-doped (Mg-Al) concentration at ratio of 2/1.