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Failure Analysis in Magnetic Tunnel Junction Nanopillar with Interfacial Perpendicular Magnetic Anisotropy

机译:具有界面垂直磁各向异性的磁性隧道结纳米柱的失效分析

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Magnetic tunnel junction nanopillar with interfacial perpendicular magnetic anisotropy (PMA-MTJ) becomes a promising candidate to build up spin transfer torque magnetic random access memory (STT-MRAM) for the next generation of non-volatile memory as it features low spin transfer switching current, fast speed, high scalability, and easy integration into conventional complementary metal oxide semiconductor (CMOS) circuits. However, this device suffers from a number of failure issues, such as large process variation and tunneling barrier breakdown. The large process variation is an intrinsic issue for PMA-MTJ as it is based on the interfacial effects between ultra-thin films with few layers of atoms; the tunneling barrier breakdown is due to the requirement of an ultra-thin tunneling barrier (e.g., <1 nm) to reduce the resistance area for the spin transfer torque switching in the nanopillar. These failure issues limit the research and development of STT-MRAM to widely achieve commercial products. In this paper, we give a full analysis of failure mechanisms for PMA-MTJ and present some eventual solutions from device fabrication to system level integration to optimize the failure issues.
机译:具有界面垂直磁各向异性(PMA-MTJ)的磁性隧道结纳米柱,因其具有低自旋转移开关电流而成为构建下一代下一代非易失性存储器的自旋转移扭矩磁性随机存取存储器(STT-MRAM)的有前途的候选人,速度快,可扩展性高,并且易于集成到传统的互补金属氧化物半导体(CMOS)电路中。但是,该设备存在许多故障问题,例如较大的工艺变化和隧穿势垒击穿。对于PMA-MTJ而言,较大的工艺差异是一个固有问题,因为它是基于很少有原子层的超薄膜之间的界面效应。隧穿势垒击穿是由于需要超薄隧穿势垒(例如,<1nm)以减小纳米柱中用于自旋传递转矩切换的电阻面积。这些故障问题限制了STT-MRAM的研究和开发以广泛地实现商业产品。在本文中,我们对PMA-MTJ的故障机制进行了全面分析,并提出了从器件制造到系统级集成的一些最终解决方案,以优化故障问题。

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