Integrated structure for a resonant micro-gyroscope and accelerometer

摘要

This paper presents the study of the mechanical behavior of a microstructure designed to detectacceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by theThELMA? surface-micromachining technique, bases detection of two components of external acceleration (onein-plane component and one out-of plane component) and two components of angular velocity (roll and yaw)on the variation of frequency of several elements set in resonance. The device, despite its small dimensions,provides a differential decoupled detection of four external quantities thanks to the presence of four slenderbeams resonating in bending and four torsional resonators.