SYNTHESIS, CHARACTERIZATION AND GAS SENSING PERFORMANCE OF SOL-GEL PREPARED NANOCRYSTALLINE SnO_2 THIN FILMS

摘要

Nanocrystalline SnO_2 thin films were successfully prepared using sol-gel dip coating technique. The starting precursor was used as tin chloride dihydrate (SnCl_2.2H_2O), ethanol and glycerin. As the prepared films were fired at 500℃. These films were characterized using XRD, FESEM and TEM to known crystal structure, surface morphology and microstructure property. Elemental composition was studied using energy dispersive spectrophotometer (EDAX). The H_2 gas sensing performance of nanocrystalline SnO_2 thin films were investigated and presented. It was found that the nanocrystalline SnO_2 thin films gives maximum gas response (S= 360) at 75 ℃. The sensor shows fast speed of response (T_Response = 2 s) and quick recover (T_recover = 8 s).