This paper tackles the use of ultrasonic motors with three degrees of freedom in view of various applications. In nanotechnology, due to their high precision values, fast speeds and response, the piezo positioning systems have become a key component in nano printing, nano production, nano assembling, high density data acquisition etc. The present paper deals with an in-depth final element analysis of the piezoceramic and turret disk of the ultrasonic rotary motor. Hence, the variation of nodal displacements for two driving values of the. Electrodes and the angular velocity in time will be illustrated. Moreover, the research renders the frequencies of the piezoelements and ultrasonic motor drive systems according to the travelling wave and various nodal displacements.
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