Electrical Properties of RF Sputtered NiCr Thin Film Resistors With Cu Contacts

摘要

Investigations on RF sputtered NiCr thin film resistors, fabricated using Cu as conductor metallization, were made. The contact resistance characteristics, resistor film characteristics and TCR of the resistors were measured. The effect of heat treatment on the resistor characteristics was studied. A suitable annealing cycle for the resistor stabilization was studied. A suitable annealing cycle for the resistor stabilization was obtained. The effect of passivation by a thin quartz film on the resistor properties was also examined. The results are presented and discussed in this paper.